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"au:"Nicholas W. Jenkins"" — arXiv2 Search
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Apr 16, 2025
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design
Jan 13, 2023
High-fidelity ptychographic imaging of highly periodic structures enabled by vortex high harmonic beams
Mar 28, 2024
Non-Destructive, High-Resolution, Chemically Specific, 3D Nanostructure Characterization using Phase-Sensitive EUV Imaging Reflectometry