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"au:"F. Scholze"" — arXiv2 Search
Showing 1–9 of 9 results
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Dec 19, 2019
The refined EUV mask model
Aug 30, 2019
A semi-analytical approach for the characterization of ordered 3D nano structures using grazing-incidence X-ray fluorescence
Oct 26, 2006
Rigorous FEM-Simulation of EUV-Masks: Influence of Shape and Material Parameters
Mar 4, 1997
Characterising a Si(Li) detector element for the SIXA X-ray spectrometer
Nov 11, 2010
Metrology of EUV Masks by EUV-Scatterometry and Finite Element Analysis
Aug 21, 2012
Analytical modeling and 3D finite element simulation of line edge roughness in scatterometry
Oct 21, 2011
Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations
Oct 8, 2020
The anisotropy in the optical constants of quartz crystals for soft X-rays
Oct 18, 2024
Polygon-based unified Fourier-modal approach for diffractive optics simulations