Near-field scanning microwave microscopy: measuring local microwave properties and electric field distributions

/ Authors

B. J. Feenstra, C. P. Vlahacos, A. Thanawalla, D. Steinhauer, S. K. Dutta, F. Wellstood, Steven M. Anlage

/ Abstract

We describe the near-field scanning microwave microscopy of microwave devices on a length scale much smaller than the wavelength used for imaging. Our microscope can be operated in two possible configurations, allowing a quantitative study of either material properties or local electric fields.

Journal: 1998 IEEE MTT-S International Microwave Symposium Digest (Cat. No.98CH36192)

DOI: 10.1109/MWSYM.1998.705152