Quantitative topographic imaging using a near-field scanning microwave microscope

We describe a technique for extracting topographic information using a scanning near-field microwave microscope. By monitoring the shift of the system’s resonant frequency, we obtain quantitative topographic images of uniformly conducting metal surfaces. At a frequency of 9.572 GHz, our technique allows a height discrimination of about 55 nm at a separation of 30 μm. We present topographic images of uneven, conducting samples and compare the height response and sensitivity of the system with theoretical expectations.