Implantation of labelled single nitrogen vacancy centers in diamond using N15

Nitrogen-vacancy (NV−) color centers in diamond were created by implantation of 7 keV N15(I=1∕2) ions into type IIa diamond. Optically detected magnetic resonance was employed to measure the hyperfine coupling of single NV− centers. The hyperfine spectrum from NV−15 arising from implanted N15 can be distinguished from NV−14 centers created by native N14(I=1) sites. Analysis indicates 1 in 40 implanted N15 atoms give rise to an optically observable NV−15 center. This report ultimately demonstrates a mechanism by which the yield of NV− center formation by nitrogen implantation can be measured.