Evidence of Coulomb explosion sputtering of ultra-thin Pt films due to impact of multi-charged Ar ions
/ Authors
/ Abstract
Abstract The phenomenon of Coulomb sputtering of ultra-thin Pt films due to impact of 20 keV highly charged Ar q + ( q =3–8) ions has been investigated. The results show enhanced erosion of the Pt film with the increase of potential energy of the Ar projectile.
Journal: Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms