Scanning microSQUID Force Microscope

A novel scanning probe technique is presented: Scanning microSQUID Force microscopy (SSFM). The instrument features independent topographic and magnetic imaging. The SSFM operates in a dilution refrigerator in cryogenic vacuum. Sample and probe can be cooled to 0.45 K. The probe consists of a microSQUID placed at the edge of a silicon chip attached to a quartz tuning fork. A topographic vertical resolution of 0.02 micrometer is demonstrated and magnetic flux as weak as $10^{-3} \Phi_{0}$ is resolved with a 1 micrometer diameter microSQUID loop.