Electronic properties of antidot lattices fabricated by atomic force lithography

Antidot lattices were fabricated by atomic force lithography using local oxidation. High quality finite 20×20 lattices are demonstrated with periods of 300 nm. The low-temperature magnetoresistance shows well developed commensurability oscillations as well as a quenching of the Hall effect around zero magnetic field. In addition, we find B-periodic oscillations superimposed on the classical commensurability peaks at temperatures as high as 1.7 K. These observations indicate the high electronic quality of our samples.