Reflection high-energy electron diffraction oscillations during epitaxial growth of artificially layered films of (BaCuOx)m/(CaCuO2)n

Abstract Pulsed laser deposition in molecular-beam epitaxy environment has been used to grow high quality BaCuO x /CaCuO 2 superlattices. In situ reflection high energy electron diffraction (RHEED) shows that the growth mechanism is two-dimensional. Furthermore, weak but reproducible RHEED intensity oscillations have been monitored during the growth. Ex situ X-ray diffraction spectra confirmed the growth rate deduced from RHEED oscillations. Such results demonstrate that RHEED oscillations can be used, even for (BaCuO x ) 2 /(CaCuO 2 ) 2 superlattices, for phase locking of the growth.