Antenna-coupled TES bolometers for CMB polarimetry

We have developed a completely lithographic antenna-coupled bolometer for CMB polarimetry. The necessary components of a millimeter wave radiometer - a beam forming element, a band defining filter, and the TES detectors - are fabricated on a silicon chip with photolithography. The densely populated antennas allow a very efficient use of the focal plane area. We have fabricated and characterized a series of prototype devices. We find that their properties, including the frequency and angular responses, are in good agreement with the theoretical expectations. The devices are undergoing optimization for upcoming CMB experiments.