Industry-compatible silicon spin-qubit unit cells exceeding 99% fidelity

Among the many types of qubit presently being investigated for a future quantum computer, silicon spin qubits with millions of qubits on a single chip are uniquely positioned to enable quantum computing. However, it has not been clear whether the outstanding high-fidelity operations and long coherence times shown by silicon spin qubits fabricated in academic settings1, 2, 3, 4, 5, 6, 7–8 can be reliably reproduced when the qubits are manufactured in a semiconductor foundry9, 10–11. Here we show precise qubit operation of silicon two-qubit devices made with standard semiconductor tooling in a 300-mm foundry environment. Of the key metrics, single- and two-qubit control fidelities exceed 99% for all four devices, and the state preparation and measurement fidelities reach up to 99.9%, as evidenced by gate set tomography. We report spin lifetime and coherence up to T1 = 9.5 s, T2*=40.6μs\documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$${T}_{2}^{* }=40.6\,{\rm{\mu }}{\rm{s}}$$\end{document} and T2Hahn=1.9ms\documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$${T}_{2}^{{\rm{Hahn}}}=1.9\,{\rm{ms}}$$\end{document}. We determine that residual nuclear spin-carrying isotopes contribute substantially to operational errors, identifying further isotopic purification as a clear pathway to even higher performance. Two-qubit operations exceeding 99% fidelity have been demonstrated by silicon devices made with standard semiconductor tooling in a 300-mm foundry environment.