Calibration-based overlay sensing with minimal-footprint targets
/ Authors
/ Abstract
Tom A. W. Wolterink, Robin D. Buijs, Giampiero Gerini, 3 Ewold Verhagen, and A. Femius Koenderink a) Center for Nanophotonics, AMOLF, Science Park 104, 1098XG Amsterdam, The Netherlands Optics Department, Netherlands Organization for Applied Scientific Research (TNO), Stieltjesweg 1, 2628CK Delft, The Netherlands Department of Electrical Engineering, Technische Universiteit Eindhoven (TU/e), 5600 MB Eindhoven, The Netherlands
Journal: Applied Physics Letters
DOI: 10.1063/5.0058307