A theory of growing crystalline nanorods – Mode I

Abstract Nanorods grow in two possible modes during physical vapor deposition (PVD). In mode I, monolayer surface steps dictate the diameter of nanorods. In mode II, multiple-layer surface steps dictate the diameter, which is the smallest possible under physical vapor deposition [5,10]. This paper reports closed-form theories of terrace lengths and nanorod diameter during the growth in mode I, as a function of deposition conditions. The accompanying lattice kinetic Monte Carlo simulations verify these theories. This study reveals that (1) quasi-steady growth exists for each set of nanorod growth conditions, and (2) the characteristic length scales, including terrace lengths and nanorod diameter at the quasi-steady state, depend on the deposition conditions – deposition rate F, substrate temperature T, and incidence angle θ – only as a function of l2D/tan θ, with l 2 D = 2 ( v 2 D F cos θ ) 1 3 as a diffusion-limited length scale and v2D as the atomic diffusion jump rate over monolayer surface steps.