Engineered arrays of NV color centers in diamond based on implantation of CN- molecules through nanoapertures
quant-ph
/ Authors
P. Spinicelli, A. Dréau, L. Rondin, F. Silva, J. Achard, S. Xavier, S. Bansropun, T. Debuisschert, S. Pezzagna, J. Meijer
and 2 more authors
/ Abstract
We report a versatile method to engineer arrays of nitrogen-vacancy (NV) color centers in dia- mond at the nanoscale. The defects were produced in parallel by ion implantation through 80 nm diameter apertures patterned using electron beam lithography in a PMMA layer deposited on a diamond surface. The implantation was performed with CN- molecules which increased the NV defect formation yield. This method could enable the realization of a solid-state coupled-spin array and could be used for positioning an optically active NV center on a photonic microstructure.