Corrugated silicon platelet feed horn array for CMB polarimetry at 150 GHz

Next generation cosmic microwave background (CMB) polarization anisotropy measurements will feature focal plane arrays with more than 600 millimeter-wave detectors. We make use of high-resolution photolithography and wafer-scale etch tools to build planar arrays of corrugated platelet feeds in silicon with highly symmetric beams, low cross-polarization and low side lobes. A compact Au-plated corrugated Si feed designed for 150 GHz operation exhibited performance equivalent to that of electroformed feeds: ~ -0.2 dB insertion loss, < -20 dB return loss from 120 GHz to 170 GHz, < -25 dB side lobes and < -23 dB cross-polarization. We are currently fabricating a 50mm diameter array with 84 horns consisting of 33 Si platelets as a prototype for the SPTpol and ACTpol telescopes. Our fabrication facilities permit arrays up to 150mm in diameter.