Optimization of a -plane (112¯0) InN grown via MOVPE on a-plane GaN buffer layers on r -plane (11¯02) sapphire

We have performed a comprehensive investigation of the growth parameter space for the MOVPE of a- plane (11 20) InN on a-plane GaN buffer layers deposited on r-plane (1 102) sapphire substrates. About 0:2 m thick a-plane InN epilayers were grown on 1 m thick a-plane GaN buffer layers in a close-coupled showerhead reactor. The growth parameters - substrate temperature, reactor pressure, V/III ratio - were systematically varied and their effect on structural, electrical, optical and morphological properties of a- plane InN films were studied. All a-plane InN epilayers show an anisotropy in the in-plane mosaicity. The (11 20) !-fwhm varies depending on the scattering vector being parallel to the c-direction or the m- direction. The magnitude and nature of this anisotropy is strongly influenced by the growth parameters. In general compared to c-plane InN, we observed a higher growth rate and a slightly higher optimum growth temperature for the a-plane InN epilayers. The optimum growth conditions are found at T = 550 o C, P = 500 Torr, V/III = 11; 000, where the !-fwhm for symmetric (11 20) reflection are 0:83 degree and 1:04 degree along (0001) and (1 100) direction respectively and for the skew-symmetric (10 11) plane is 1:47 degree. The optimized a-plane InN has a photoluminescence peak emission at 1750 nm ( 0:71 eV) at low temperature (11 K) and a mobility of 234cm 2 =V:s, carrier concentration 1:4 10 19 cm 3 at room temperature.